Keithley 590 Capacitance Voltage Analyzer
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Keithley 590 measures capacitance-voltage and capacitance-time characteristics of semiconductor devices with 0.1 fF sensitivity and up to 1 MHz.
Product details
| Model | 590 |
| Manufacturer | Keithley |
| Category | Power Analyzers |
| Availability | Made to order |
Description
Overview
The Keithley Model 590 CV Analyzer measures capacitance versus voltage (C-V) and capacitance versus time (C-t) characteristics of semiconductor devices. Tailored specifically for semiconductor device testing, the Model 590 provides high-frequency CV measurements essential for characterizing p-n junctions, Schottky junctions, Metal-Insulator-Semiconductor (MIS) devices, and validating performance of FETs, memory cells, CCDs, and isolation structures.
Key Features
- Capacitance range: 10 fF to 20 nF (up to 20 nF at 100 kHz with Model 5904 adapter)
- Conductance range: 0.1 nS to 1 µS
- 0.1 fF sensitivity for testing small devices
- Test signal voltage: 15 mV rms
- Dual frequency operation: 1 MHz (compliance with existing standards) or 100 kHz (improved resolution and accuracy)
- Selectable measurement rate: 1 to 1000 readings per second
- Built-in filter for speed/resolution optimization
- Sophisticated transmission line error correction for device connections
- Built-in test setup and correction value storage, analysis, and plotter control
Specifications
| Capacitance Range | 10 fF to 20 nF |
| Capacitance Range (with Model 5904 adapter) | Up to 20 nF at 100 kHz |
| Conductance Range | 0.1 nS to 1 µS |
| Sensitivity | 0.1 fF |
| Test Signal Voltage | 15 mV rms |
| Test Frequencies | 100 kHz, 1 MHz, or both selectable |
| Measurement Rate | 1 to 1000 readings per second |
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Keithley 590 Capacitance Voltage Analyzer
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