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Keithley 595 Quasistatic C-V Capacitance Meter

Keithley · Model: 595 Made to order
Keithley 595 Quasistatic C-V Capacitance Meter
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Keithley 595 quasistatic C-V meter for MIS device testing, measuring capacitance (10 fF–20 nF) and current (1 fA–200 µA) with automatic leakage correction.

Model 595
Manufacturer Keithley
Category RF Power Meters
Availability Made to order

Overview

The Keithley 595 is a specialized instrument for measuring quasistatic capacitance versus voltage (C-V) characteristics of Metal Insulator Semiconductor (MIS) semiconductor devices. It provides precise C-V measurements combined with DC current measurement capabilities, with built-in correction and diagnostics to ensure accurate results even with slow voltage sweeps required by modern devices.

Key Features

  • Measures quasistatic capacitance from 10 fF to 20 nF
  • DC current measurement from 1 fA to 200 µA
  • Automatic correction of capacitance readings for background leakage currents
  • Rapid assurance of device equilibrium
  • Superior signal-to-noise performance with slow voltage sweeps
  • Comprehensive diagnostics for reliable test results

Applications

  • MIS device characterization and testing
  • Semiconductor process development and qualification
  • Device reliability and failure analysis
  • Wafer and device acceptance testing
Capacitance Range 10 fF to 20 nF
DC Current Range 1 fA to 200 µA
Measurement Type Quasistatic C-V characteristics
Device Type Metal Insulator Semiconductor (MIS)
Signal Processing Built-in leakage current correction
Keithley 595 Quasistatic C-V Capacitance Meter

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Keithley 595 Quasistatic C-V Capacitance Meter

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